This contribution introduces a technique for the electromagnetic analysis of thin-film bulk acoustic wave resonators (FBAR). The piezoelectric/acoustic linear equations are coupled to and solved with Maxwell's equations. For the acoustic propagation, mono-dimensional behavior is assumed, while full-wave 3D Maxwell's equations are rigorously solved for the complete circuit. Comparison with experimental data shows very good agreement.
Electromagnetic Modelling of Thin-Film Bulk Acoustic Resonators / Farina, Marco; Rozzi, Tullio. - In: IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES. - ISSN 0018-9480. - 52:(2004), pp. 2496-2502. [10.1109/MWSYM.2004.1335902]
Electromagnetic Modelling of Thin-Film Bulk Acoustic Resonators
FARINA, Marco;ROZZI, TULLIO
2004-01-01
Abstract
This contribution introduces a technique for the electromagnetic analysis of thin-film bulk acoustic wave resonators (FBAR). The piezoelectric/acoustic linear equations are coupled to and solved with Maxwell's equations. For the acoustic propagation, mono-dimensional behavior is assumed, while full-wave 3D Maxwell's equations are rigorously solved for the complete circuit. Comparison with experimental data shows very good agreement.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
