This contribution introduces a technique for the electromagnetic analysis of thin-film bulk acoustic wave resonators (FBAR). The piezoelectric/acoustic linear equations are coupled to and solved with Maxwell's equations. For the acoustic propagation, mono-dimensional behavior is assumed, while full-wave 3D Maxwell's equations are rigorously solved for the complete circuit. Comparison with experimental data shows very good agreement.
Electromagnetic Modeling of Thin-Film Bulk Acoustic Resonators / Farina, Marco; Rozzi, Tullio. - vol 1:(2004), pp. 383-386. (Intervento presentato al convegno Microwave Symposium Digest, 2004 IEEE MTT-S International tenutosi a Forth Worth (Texas) nel Giugno 2004).
Electromagnetic Modeling of Thin-Film Bulk Acoustic Resonators
FARINA, Marco;ROZZI, TULLIO
2004-01-01
Abstract
This contribution introduces a technique for the electromagnetic analysis of thin-film bulk acoustic wave resonators (FBAR). The piezoelectric/acoustic linear equations are coupled to and solved with Maxwell's equations. For the acoustic propagation, mono-dimensional behavior is assumed, while full-wave 3D Maxwell's equations are rigorously solved for the complete circuit. Comparison with experimental data shows very good agreement.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
