Generalized Thru-Reflect-Line Calibration for 1-220-GHz Single-Sweep Ultra-Wideband On-Wafer Measurement

The Generalized Thru-Reflect-Line (GTRL) calibration technique was originally developed for multi-mode waveguides. This work explored the GTRL technique for single-tier calibration of on-wafer two-port measurement of a Grounded Coplanar Waveguide (GCPW) transmission line. The GCPW, fabricated on 50-μm-thick SiC, is intrinsically a single-mode device. In this case, the GTRL technique was found comparable to the conventional two-tier LRRM + TRL technique in calibrating the single-sweep ultra-wideband measurement from 1 to 170 GHz. Above 170 GHz, both techniques fail to capture the suck out due to direct probe-probe crosstalk. Nevertheless, this shows that the GTRL technique can at least converges for a single-mode device. It remains to be proven that by accounting for probe-probe crosstalk, the GTRL technique can better handle the GCPW when it becomes multimode.